Torr Scientific have an in-house dedicated UHV bakeout facility, which allows us to offer a bakeout and helium leak-test service to customers. A residual gas analyser (RGA) scan can be included as part of the package.
Our oil-free dedicated UHV bakeout facility is based around a dry-pump-backed 400 l/s turbo pump mounted on a dedicated bench with an upper bakeout zone.
The upper bakeout area is fully temperature controlled and can reach a maximum temperature of 300°C. It can maintain bakeout times of length 12, 24, or 48 hours. Heating and cooling ramp rates can be set via a dedicated programmable temperature controller. Heating is fan-assisted to ensure good circulation around the bakeout zone and to avoid hot and cold spots.
System pressure is monitored by an ion-gauge controller. Temperature and pressure are automatically recorded throughout the bakeout and can be provided as part of a full report.
In addition, a 0 to 100 amu RGA mass spectrometer with electron multiplier can be used to record the system partial pressures before and after bakeout. These spectra can also be provided as part of the report if required.
The bakeout zone is designed to be as flexible as possible to accommodate a range of sizes and space envelopes, multiple viewports for instance can be tested at the same time on dedicated vacuum fittings.
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